Ultrasonic Systems for Precise Cleaning Applications
2045 Martin Avenue, Suite 204 Santa Clara, CA 95050

Quava Mega Puck Flow Silicon Wafer Cleaning System 

Kaijo’s Quava Mega Puck Flow silicon wafer cleaning system is designed for a higher flow rate and higher rotational velocity near proximity cleaning of silicon wafers and other applications, including  HDD Media, and FPD glass. The Mega Puck Flow megasonic transducer directs high-power acoustic energy by scanning across large surfaces. Kaijo offers a full line of high-performance Megasonic Cleaning systems and equipment to meet your specific cleaning requirements. If you have any questions about the Quava mega Puck Flow silicon wafer cleaning system or need more information on how our products can be used for your application, call us at 408 675-5575.

Quava Mega Puck Flow Silicon Wafer Cleaning System

Benefits:

Features:

Mega Puck Flow Generator Specifications

Model
30110 (QR-003)
Output
1.0 to 100 watts
Output Adjustment
0.1 watt intervals
Frequency
950kHz
Oscillation Mode
PLL mode, A mode
Frequency Control
Automatic Tracking PLL system
Power Source
AC100-240v ±10%, 50/60Hz, Ø1
Current
5A
Output Display
7-segment digital display in 4 digits
Communication
Remote Terminal, RS-485, DeviceNet
Dimensions
(WxDxH) in mm
218 x 258 x 138
Weight
5kg

Mega Puck Flow Megasonic Transducer Specifications

Model Number
38S
38Q
38Sa
Frequency
950kHz
Generator
30110(QR-003)
Input
50W
Material of Body
SUS
ECTFE
ECTFE
Material of Transducer Plate
SUS
Quartz
Sapphire
Ultrasonic effective area
φ40
Liquid temperature
15 – 40 degrees
Liquid frow
1.0 – 2.0 L/min
Material of Gasket
FFKM / Gumlast
Mega Puck Flow Megasonic Transducer top view

Mega Puck Flow Megasonic Transducer -top view

Mega Puck Flow Megasonic Transducer side view

Mega Puck Flow Megasonic Transducer -side view

Mega Puck Flow Megasonic Transducer stainless steel side view

Mega Puck Flow Megasonic Transducer stainless steel -side view

Mega Puck Flow Megasonic Transducer stainless steel bottom view

Mega Puck Flow Megasonic Transducer stainless steel -bottom view

If you have any questions about the Quava Mega Puck Flow silicon wafer cleaning system or need more information on how our products can be used for your application, call us at 408 675-5575 or email info@kaijo-shibuya.com.